Project Descriptions by Thrust

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Advanced Materials, Processes, and Packaging

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Integration of Bulk Piezoelectric Materials into MEMS
Ethem Erkan Aktakka, Rebecca L. Peterson, and Khalil Najafi

High-Frequency, Large-Deflection Electrostatic Actuators for Micro Propulsion
Seow Yuen Yee, Rebecca L. Peterson, Luis P. Bernal, and Khalil Najafi

Micro-Hydraulic Structure for High Performance Bio-Mimetic Hair-like Air Flow Sensor Arrays
Mahdi Sadeghi, Rebecca L. Peterson, and Khalil Najafi

High Performance Micromachined Rate-Integrating Gyros
Jae Yoong Cho, Jialiang Yan, and Khalil Najafi

Bismuth/Antimony Telluride-Based Co-Evaporated Thermoelectric Thin Films
Niloufar Ghafouri, Rebecca L. Peterson, Ctirad Uher, and Khalil Najafi

Demonstration System for Chemical Analysis Using Knudsen Pump, Fiber-Integrated Optical Detector, and Si-Micromachined Column
Jing Liu, Naveen K. Gupta, Yogesh B. Gianchandani, Kensall D. Wise, and Xudong (Sherman) Fan

A Micromachined Sensor for In-Situ Multi-functional Chemical Analysis in Sea Floor Environments
Tao Li, Kang Ding, William E. Seyfried, Jr., and Yogesh B. Gianchandani

Batch Mode Micromachining of Bulk Metals and Ceramics with µEDM and µUSM
Tao Li and Yogesh B. Gianchandani

Modeling and Optimization of a Single Chip Timing and Inertial Measurement Unit
Behrouz Shiari, Jae Yoong Cho, Jeffrey Gregory, Guohong He, Rebecca L. Peterson, and Khalil Najafi

Package of Silica for Timing & Inertial Measurement (PASTIME)
Zongliang Cao, Jialiang Yan, Yi Yuan, Jae Yoong Cho, Guohong He, Rebecca L. Peterson, and Khalil Najafi

Wireless Magnetoelastic Monitoring of Intraluminal Prostheses
Scott Green, Anupam Viswanath, and Yogesh Gianchandani

Wireless Magnetoelastic Resonant Rotary Stage
Jun Tang, Scott R. Green, and Yogesh B. Gianchandani

Fundamental Studies of High Flow and High Vacuum Knudsen Pumps
Seungdo An, Naveen K. Gupta, and Yogesh B. Gianchandani

Smart Biopsy Tools for Tissue Contrast Sensing, Needle Tract Cauterization and Cauterization Monitoring
Tao Li and Yogesh B. Gianchandani

Microfluidic Actuation by Marangoni Forces
Erwin Hendarto and Yogesh B. Gianchandani

Harsh Environment Sensors Based on Microdischarges
Christine Eun, Xin Luo, and Yogesh B. Gianchandani